Radial line slot antenna plasma

US7164387B2 - Compact tunable antenna - Google Patents The present disclosure relates to a method and an antenna for transmitting/receiving a RF signal at a plurality of different frequencies. Transmitting/receiving a RF signal at a plurality of different frequencies is achieved by providing a …

TM CVD Processes in Ar+H2+SiH4+C2H6 and Dopant Gas Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is TEL Announces Release of New Plasma Nitridation System ... Trias SPA applies the unique Slot Plane Antenna (SPA) plasma generation technology, which was created out of the wealth of plasma technology TEL has acquired over many years. SPA is based on the Radial Line Slot Antenna (RLSA) microwave plasma developed by Professor Tadahiro Omi of Tohoku University. A Model for Antenna-Plasma Wave Co upling towards Control ...

A radial slot antenna (1; 60) comprising a radial waveguide, which includes an upper plate (5), having a centroid (O) and an edge region (14) and provided with aA novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed.

Computational modeling study of the radial line slot … A radial line slot antenna without a slow wave structureDocuments. Application of the ECR slot antenna plasma source for ion implantationDocuments.Micro-strip line feed I shaped slot Antenna with finite ... and slot antenna were successfully used to achieve the required antenna performances. Radial Line Slot Antennas The radial line slot antenna (RLSA) is a paral-lel plate slot antenna, which was proposed as a pencil beam antenna for DBS reception in 12 GHz band [2], [3]. The simple structure of parallel plate waveguide results in low transmission loss and cost-eectiveness. The ex-cellent eciency of more than... Slot Antenna | Article about Slot Antenna by The Free…

A Reconfigurable Radial Line Slot Array Antenna for... |…

power in the radial line slot antenna source was 3000 W and the flow rate of arsine was 0.7 sccm diluted in 999.3 sccm he-lium with a process pressure of 150 mTorr. SIMS measured profiles for blanket wafer (fin top) doping are presented in Fig. 1 for both pre- and post-anneal conditions. Figure 2 is a On the Near-Field Shaping and Focusing Capability of a Radial ... the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION Microwave power coupling in a surface wave excited plasma density plasma can form with an ion sheath layer along the antenna. Then the microwave was fed into the coaxial wave-guide from the right side of the system. Now the input microwave power could propagate easily along the negative biased antenna and surface wave excited plasma generated along the antenna inside the chamber. Simulation of microwave pulsing in a radial line slot antenna ...

Radial Line Slot Antennas | SpringerLink

Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. Plasma production using rotating mode radial line slot ... A rotating mode radial line slot antenna (RLSA) with densely arrayed slots has already been proposed for plasma processing system and the basic characteristics were confirmed. Impact of static magnetic fields on the radial line slot ... The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies. Large volume diffusion plasmas, of which the radial line slot antenna source is one type, must overcome transport effects or diffusion modes that tend to ... Simulations of the Plasma Structure of a Radial Line ...

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plasma doping. Concentration depth profiles associated with arsenic plasma doping using a radial line slot antenna plasma source22 are includedinFig.1 [Secondary Ion Mass Spectrometry (SIMS)] a)Authors to whom correspondence should be addressed. Electronic addresses: peter.ventzek@us.tel.com and gshwang@che.utexas.edu Near-Field Distribution of Radial Line Slot Antenna for ... the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas | SpringerLink Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ...

In the present paper, a historical review isfrequency antenna is based on the physical picture of such US6239760B1 - Contrawound toroidal helical antenna - Google